Vertical probe card and air cooled probe head system

Details Vertical probe card and air cooled probe head system Vertical probe card and air cooled probe head system

2006-10-24

2006-10-24

Tang, Minh Nhut (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S760020

Reexamination Certificate

active

07126361

ABSTRACT:
A probe card is vertically mounted generally perpendicular to a wafer undergoing life tests in a heated environment to limit exposure of the probe card to heat from the wafer chuck. The probe card and probe head assembly are mounted on a support rail which has one or more channels for the flow of cool air to a probe head assembly and the probe card, while it shields the flex cable from the hot chuck. The cool air flow disrupts convective hot air flow upwards from the heated chuck to the probe card and probe head and facilitates cooling of the probe card and probe head.

REFERENCES:
patent: 4038599 (1977-07-01), Bove et al.
patent: 4195259 (1980-03-01), Reid et al.
patent: 6342788 (2002-01-01), McAllister et al.
patent: 6515358 (2003-02-01), Dass et al.

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