Vertical probe card

Details Vertical probe card Vertical probe card

2005-02-08

2005-02-08

Pert, Evan (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754090, C324S1540PB

Reexamination Certificate

active

06853208

ABSTRACT:
Purpose: To present a vertical probe card capable of reusing without replacing a broken probe if a probe is broken. Constitution: A vertical probe card having vertical probes100, being used in measurement of electric characteristics of an LSI chip610to be measured, comprising a main substrate300forming conductive patterns310, a plurality of probes100drooping vertically from the main substrate300, and a probe support200provided at the back side of the main substrate300for supporting the probes100, in which the probe support200is disposed parallel to the main substrate300, and has an upper guide plate210and a lower guide plate220for supporting the probes100by passing the through-holes211,221opened in each, and the lower guide plate220is composed of three substrates220A,220B,220C laminated separably.

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