Vertical polishing tool and method

Details Vertical polishing tool and method Vertical polishing tool and method

1997-04-30

1999-04-27

Scherbel, David A.

Abrading

Abrading process

Glass or stone abrading

451287, 451289, B24B 100, B24B 719

Patent

active

058974253

ABSTRACT:
A vertically-oriented wafer polishing apparatus and method is disclosed including a vertically-oriented polishing device, a semiconductor wafer carrier and a cleaning module to clean the polishing device by removing contaminants that may scratch the wafer and also reduce the polishing rate of the apparatus. The device reduces the "down time" of a polishing apparatus and, therefore, increases the yield of well-polished wafers in a given time period.

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