Vertical polishing device and method

Details Vertical polishing device and method Vertical polishing device and method

1997-04-30

1999-07-27

Scherbel, David A.

Abrading

Abrading process

Glass or stone abrading

451285, 451287, B24B 100

Patent

active

059280620

ABSTRACT:
The present invention relates to a chemical mechanical polishing (CMP) machine and method in which at least one polishing device is provided with a vertically-oriented polishing surface and a slurry delivery mechanism. As a result, the footprint of the machine is greatly reduced and the prevention of contaminants embedding in the polishing device can be promoted.

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