Vertical parallel plate capacitor

Details Vertical parallel plate capacitor Vertical parallel plate capacitor

1998-10-09

2000-07-25

Sough, Hyung-Sub

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361305, 3613063, 361313, 29 2542, H01G 4005, H01G 4228, H01G 406

Patent

active

060943351

ABSTRACT:
A method for fabricating a vertical parallel plate capacitor is provided. In the method, a sacrificial layer is formed on at least a portion of a surface. A dielectric layer is conformally formed on the sacrificial layer and an exposed portion of the surface. The dielectric layer is etched so as to leave substantially only a fence of dielectric material along a sidewall of the sacrificial layer. The sacrificial layer is removed, and a conductive layer is deposited on the fence and surface. The conductive layer is etched and planarized so as to form a first capacitor plate along one side of the fence, and a second capacitor plate along the other side of the fence, the first and second capacitor plates being substantially parallel to each other, and transverse sections of the capacitor plates including elongated portions substantially normal to the surface.

REFERENCES:
patent: 5006909 (1991-04-01), Kosa
patent: 5583359 (1996-12-01), Ng et al.
patent: 5705438 (1998-01-01), Tseng
patent: 5712813 (1998-01-01), Zhang
patent: 5789289 (1998-08-01), Jeng
patent: 5940713 (1999-08-01), Green
patent: 5998260 (1999-12-01), Lin

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