Vertical needle type probe card, method of manufacturing thereof

Details Vertical needle type probe card, method of manufacturing thereof Vertical needle type probe card, method of manufacturing thereof

1998-04-07

2000-11-07

Metjahic, Safet

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324758, 324761, G01R 3102

Patent

active

061442127

ABSTRACT:
A main object of the present invention is to provide a vertical needle type probe card which is improved so that necessary needle pressure is obtained even if variation of the probe needles in the height direction is larger to some extent. The upper portion of a probe needle is supported by an upper guide plate. The lower portion of probe needle is supported by a lower guide plate. Upper portion of probe needle is bent into an L shape. A conductive rubber sheet and a printed wiring board are provided on upper guide plate.

REFERENCES:
patent: 3911361 (1975-10-01), Bove et al.
patent: 5225777 (1993-07-01), Bross et al.
patent: 5325052 (1994-06-01), Yamashita
patent: 5440240 (1995-08-01), Wood et al.
patent: 5477160 (1995-12-01), Love
patent: 5850148 (1998-12-01), Nam
patent: 5952843 (1999-09-01), Vinh
Nikkei Microdevices, Sep. 1996, pp. 101-106.

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