Vertical nanotube field effect transistor

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is

Reexamination Certificate

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C257S024000, C257S346000, C257SE51040, C977S938000, C977S940000

Reexamination Certificate

active

07635856

ABSTRACT:
A self-aligned carbon-nanotube field effect transistor semiconductor device comprises a carbon-nanotube deposited on a substrate, a source and a drain formed at a first end and a second end of the carbon-nanotube, respectively, and a gate formed substantially over a portion of the carbon-nanotube, separated from the carbon-nanotube by a dielectric film.

REFERENCES:
patent: 6515325 (2003-02-01), Farnworth et al.
patent: 6515339 (2003-02-01), Shin et al.
patent: 6566704 (2003-05-01), Choi et al.
patent: 6740910 (2004-05-01), Roesner et al.
patent: 10036897 (2002-01-01), None
patent: 1 124 262 (2001-08-01), None
Richard Martel, et al., “Carbon Nanotube Field Effect Transistors for Logic Applications,” pp. 7.5.1-7.5.4, 2001, IEEE.
J.W. Park, et al., “Effects of Artificial Defects on the Electrical Transport of Single-Walled Carbon Nanotubes,” pp. 133-135, vol. 80, No. 1, Jan. 7, 2002.

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