Measuring and testing – Volume or rate of flow – Proportional
Reexamination Certificate
2007-11-20
2007-11-20
Thompson, Jewel (Department: 2855)
Measuring and testing
Volume or rate of flow
Proportional
Reexamination Certificate
active
11284452
ABSTRACT:
A thermal mass flow meter for measuring flow rate of a fluid includes a conduit that is configured to receive the fluid and that defines a primary flow path between an inlet and an outlet of the conduit. The conduit is bound at least in part by a sensor receiving surface. A thermal sensor tube has a thermal sensing portion that is mounted relative to the sensor receiving surface in a direction substantially perpendicular to both the primary flow path and the sensor receiving surface. When the thermal mass flow meter is mounted in a vertical direction so that fluid within the conduit flows in the vertical direction along the primary flow path, fluid within the sensor tube flows in a horizontal direction so as to substantially prevent thermal siphoning when the sensor tube is heated.
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Ding Junhua
L'Bassi Michael
Zarkar Kaveh H.
McDermott Will & Emery LLP
MKS Instruments Inc.
Thompson Jewel
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