Vertical/horizontal small angle X-ray scattering apparatus...

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis

Reexamination Certificate

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C378S071000, C378S079000, C378S081000, C378S086000

Reexamination Certificate

active

08000444

ABSTRACT:
A vertical/horizontal small angle X-ray scattering apparatus, for enabling plural numbers of X-ray diffraction measurements, such as, transmission small angle X-ray diffraction, reflection small angle scattered X-ray diffraction, and in-plane X-ray diffraction, etc., comprises an X-ray generating apparatus11for generating X-ray, an optic system16for forming the X-ray into a predetermined incident beam of X-ray, a sample holder portion120for mounting a sample to be measured thereon, to irradiate the incident beam of X-ray thereupon, a vacuum path17for passing through small angle scattered X-ray from the sample, and an X-ray detector18for detecting the small angle scattered X-ray passing through the vacuum path, wherein the sample holder portion is fixed on a support base110, while attaching the X-ray generating apparatus, the optic system, the vacuum path and the X-ray detector on a bench100, as well, to be rotatable around the sample holder portion, and thereby enabling plural numbers of measurements of small angle X-ray scattering.

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“Characterization of Polymer Thin Films With Small-Angle X-ray Scattering under Grazing Incidence (GISAXS)”, Smilgies et al, Synchrotron Radiation News, vol. 15, No. 5, 2002 pp. 35-42.
Japanese Office Action, dated Aug. 2, 2010, issued in corresponding Japanese Patent Application No. 2007-533127.

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