Metallurgical apparatus – Means treating solid metal – By contact with gas
Patent
1990-08-07
1991-09-17
Kastler, S.
Metallurgical apparatus
Means treating solid metal
By contact with gas
266251, C21D 106
Patent
active
050488007
ABSTRACT:
A vertical heat treatment apparatus includes a reaction furnace constituted by a reaction chamber having an inner tube and an outer tube and a heater arranged outside the reaction chamber, a manifold communicating with a lower portion of the reaction chamber to support the reaction chamber and a gas being supplied and exhausted through the mainfold, a hollow vessel, arranged together with the boat in the reaction furnace, for supporting a lower end of a boat having objects, and a plurality of first heat-insulating members detachably arranged in the hollow vessel, wherein the number of the first insulating members is adjusted to adjust a heat-insulating effect. The first heat-insulating member includes a fin unit constituted by fins horizontally arranged at predetermined intervals and spacers for keeping the intervals between the fins.
REFERENCES:
patent: 2081990 (1937-06-01), Eberwein
patent: 4445852 (1984-05-01), Corbett
patent: 4846675 (1989-07-01), Soliman
Iwabuchi Katuhiko
Komino Mituaki
Miyazaki Shinji
Moriya Takahiko
Yagi Yasushi
Kabushiki Kaisha Toshiba
Kastler S.
Tokyo Electron Sagami Limited
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