Vertical heat treatment apparatus

Details Vertical heat treatment apparatus Vertical heat treatment apparatus

1995-11-03

1997-10-14

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219413, 373136, 118725, F27D 1900

Patent

active

056768699

ABSTRACT:
A vertical heat treatment apparatus is provided with a cylindrical insulating layer surrounding the periphery of a vertical processing chamber accommodating objects to be subjected to thermal processing and a resistance heating member provided along the inner periphery of the insulating layer. To control the temperature of the resistance heating member, a temperature measuring element having a thermocouple in a tip portion of an insulated protective tube is inserted at an angle from the outside of the insulating layer and a tip portion of the temperature measuring element is aligned with the resistance heating member. This reduces the temperature error between the resistance heating member and the temperature measuring element and also greatly improves the response rate and reproducibility of temperature measurement, thus facilitating temperature management in the vertical heat treatment apparatus.

REFERENCES:
patent: 4061870 (1977-12-01), Mizushima
patent: 4123989 (1978-11-01), Jewett
patent: 4348580 (1982-09-01), Drexel
patent: 5125359 (1992-06-01), Barale et al.
patent: 5128515 (1992-07-01), Tanaka
patent: 5171972 (1992-12-01), Hidano

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