Vertical heat treating device

Details Vertical heat treating device Vertical heat treating device

1993-11-26

1995-04-18

Kastler, Scott

Metallurgical apparatus

Means treating solid metal

By contact with gas

432241, F27D 306

Patent

active

054071810

ABSTRACT:
This invention relates to a vertical heat treating device of a two-boat system including below a vertical reaction furnace a first waiting position where a treated boat waits, and second waiting position where a boat to be next treated waits. The device comprises boat transferring device for transfer wafers at the first and the second waiting positions and at the vertical reaction furnace. The boat transferring device can be displaced in a two-dimensional plane at least including rotation and radial displacement from the rotation center. A heat shielding member is also provided for hindering thermal influence between the first and the second waiting positions so that the first and the second waiting positions can be positioned as near each other as possible to minimize a space occupied by the boat transferring device, whereby the vertical heat treating device can be made smaller-sized.

REFERENCES:
patent: 4770590 (1988-09-01), Hugues et al.
patent: 5055036 (1991-10-01), Asano et al.
patent: 5236181 (1993-08-01), Ishii et al.
English Language Abstract of Japanese Laid-Open Patent Publication No. 63-314843 dated Dec. 22, 1988.

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