Vertical heat-treating apparatus

Details Vertical heat-treating apparatus Vertical heat-treating apparatus

1991-09-25

1993-08-10

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118719, 118723, H01L 2100

Patent

active

052345289

ABSTRACT:
A vertical heat-treating apparatus to be used for a thermal diffusion step or film-forming step in the manufacture of a semiconductor device is proposed. This vertical heat-treating apparatus is characterized in that a work piece-waiting mechanism is incorporated in the apparatus for applying a pre-treatment to workpieces such as semiconductor wafers so as to prevent oxidation of the workpiece, or to remove the natural oxide film formed on the surface of the workpiece.

REFERENCES:
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4825808 (1989-05-01), Takahashi et al.
patent: 5015330 (1991-05-01), Okumura et al.

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