Vertical heat processing apparatus and method for using the...

Details Vertical heat processing apparatus and method for using the... Vertical heat processing apparatus and method for using the...

2007-07-03

2009-08-18

Wilson, Gregory A (Department: 3749)

Heating

Work feeding, agitating, discharging or conveying...

Having distinct heat shield, conductor, director or...

C432S251000, C219S390000, C118S725000

Reexamination Certificate

active

07575431

ABSTRACT:
A vertical heat processing apparatus for performing a heat process on a plurality of target substrates all together includes a vertical process container configured to accommodate the target substrates and having a transfer port at a bottom; a holder configured to support the target substrates at intervals in a vertical direction inside the process container; and a heater disposed around the process container, and configured to supply heat rays through a sidewall of the process container, so as to heat an interior of the process container. A thermal buffer member is disposed between the heater and a lower end side of the process container to surround the lower end side, and is configured to decrease transmissibility of the lower end side for heat rays between the heater and target substrates inside the process container.

REFERENCES:
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patent: 5482558 (1996-01-01), Watanabe et al.
patent: 5482559 (1996-01-01), Imai et al.
patent: 5520742 (1996-05-01), Ohkase
patent: 2006/0216941 (2006-09-01), Hasebe et al.
patent: 2006/0286817 (2006-12-01), Kato et al.
patent: 2000-026973 (2000-01-01), None

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