Vertical furnace for heat-treating semiconductor

Details Vertical furnace for heat-treating semiconductor Vertical furnace for heat-treating semiconductor

1986-06-09

1987-09-22

Goldberg, E. A.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219388, 219411, 414172, 118725, 118729, 118 501, H05B 362, F27B 906, F27B 920

Patent

active

046957065

ABSTRACT:
A vertical furnace for heat-treating a semiconductor is capable of effectively and safely accomplishing the heat-treating of a semiconductor. The vertical furnace includes a furnace section which is opened at the lower end thereof to allow a boat for supporting a semiconductor thereon to be introduced and removed through the lower opened end with respect to the furnace section. Also, a vertical furnace is adapted to effectively prevent a semiconductor from being polluted by dust in an operation space.

REFERENCES:
patent: 1824310 (1931-09-01), Thompson
patent: 2332943 (1943-10-01), Sobers
patent: 2344035 (1944-03-01), Etten
patent: 2940745 (1960-06-01), Grieger
patent: 3081988 (1963-03-01), Hess
patent: 3342161 (1967-09-01), Heim
patent: 3441652 (1969-04-01), Eicker
patent: 3749383 (1973-07-01), Voigt
patent: 4412812 (1983-11-01), Sadowski
patent: 4524719 (1985-06-01), Campbell

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