Vertical displacement device

Details Vertical displacement device Vertical displacement device

2007-05-08

2007-05-08

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S479000

Reexamination Certificate

active

11065017

ABSTRACT:
A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.

REFERENCES:
patent: 6134003 (2000-10-01), Tearney et al.
patent: 6392752 (2002-05-01), Johnson
patent: 6485413 (2002-11-01), Boppart et al.
patent: 6564087 (2003-05-01), Pitris et al.
patent: 6943892 (2005-09-01), Chan
patent: 2003/0218756 (2003-11-01), Chen et al.
patent: 2005/0018201 (2005-01-01), de Boer et al.

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