Vertical cavity surface emitting laser with integrated diffracti

Details Vertical cavity surface emitting laser with integrated diffracti Vertical cavity surface emitting laser with integrated diffracti

1997-10-02

1999-10-12

Davie, James W.

Coherent light generators

Particular resonant cavity

Distributed feedback

372 46, 372 99, H01S 308, H01S 319

Patent

active

059663995

ABSTRACT:
VCSEL with integrated lens element and method of fabrication including a substrate element, a first stack of distributed Bragg reflectors disposed on a surface of the substrate element, an active region lattice matched to a surface of the first stack of distributed Bragg reflectors, and a second stack of distributed Bragg reflectors lattice matched to a surface of the active region. The active region includes at least one quantum well layer and a plurality of barrier layers. A lens element is integrated with the VCSEL structure being etched directly into an uppermost surface of the second stack of distributed Bragg reflectors or etched into a layer of silicon nitride (SiN) disposed on an uppermost surface of the second stack of distributed Bragg reflectors.

REFERENCES:
patent: 5426657 (1995-06-01), Vakhshoori
patent: 5838715 (1998-11-01), Corzine et al.

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