Vertical-cavity surface-emitting laser, module, optical...

Details Vertical-cavity surface-emitting laser, module, optical... Vertical-cavity surface-emitting laser, module, optical...

2008-11-20

2010-10-19

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular resonant cavity

Specified cavity component

C372S050110, C372S050124, C372S092000

Reexamination Certificate

active

07817703

ABSTRACT:
Provided is a VCSEL that includes a first semiconductor multilayer film reflective mirror of a first conductivity type formed on a substrate and having a first impurity concentration; an active region formed thereon; a second semiconductor multilayer film reflective mirror of a second conductivity type formed on and close to the active region and having a second impurity concentration; a third semiconductor multilayer film reflective mirror of the second conductivity type formed thereon and having a third impurity concentration being higher than the second impurity concentration; and a fourth semiconductor multilayer film reflective mirror of the second conductivity type formed thereon and having a fourth impurity concentration being higher than the second impurity concentration. The reflective mirrors include a pair of a low-Al semiconductor layer and a high-Al semiconductor layer. The Al-composition of the low-Al semiconductor layer in the second reflective mirror is higher than that of the fourth mirror.

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