Coherent light generators – Particular active media – Semiconductor
Patent
1997-09-15
2000-02-01
Davie, James W.
Coherent light generators
Particular active media
Semiconductor
372 96, H01S 3085
Patent
active
060211466
ABSTRACT:
A VCSEL for high power single mode operation and method of fabrication including a substrate element, a first stack of distributed Bragg reflectors disposed on a surface of the substrate element, an active region lattice matched to a surface of the first stack of distributed Bragg reflectors, and a second stack of distributed Bragg reflectors lattice matched to a surface of the active region. The VCSEL structure includes an enhanced conductivity region formed within a central portion of the second stack of distributed Bragg reflectors and within the laser emission path. The enhanced conductivity region is defined by either zinc diffusion or beryllium implants. An electrical contact is coupled to a surface of the second stack of distributed Bragg reflectors and an electrical contact is positioned a surface of the substrate element.
REFERENCES:
patent: 4873696 (1989-10-01), Coldren et al.
patent: 5245622 (1993-09-01), Jewell et al.
patent: 5568499 (1996-10-01), Lear
patent: 5724376 (1998-03-01), Kish Jr. et al.
Jiang Wenbin
Lebby Michael S.
Ramdani Jamal
Davie James W.
Koch William E.
Motorola Inc.
Parsons Eugene A.
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