Vertical cavity surface emitting laser for high power operation

Details Vertical cavity surface emitting laser for high power operation Vertical cavity surface emitting laser for high power operation

1997-02-10

1999-06-22

Davie, James W.

Coherent light generators

Particular temperature control

Heat sink

372 45, 372 96, H01S 319

Patent

active

059149736

ABSTRACT:
A VCSEL for high power operation and method of fabrication including a substrate element, a heat dissipation layer disposed on the substrate element, a first mirror stack, an active region lattice matched to a surface of the first mirror stack, and a second mirror stack lattice matched to a surface of the active region. An electrical contact is coupled to a surface of the active region and an electrical contact is positioned on another surface of the active region. The VCSEL is fabricated initially as two wafer structures each including a heat dissipation layer. The two wafer structures are flip mounted and the two heat dissipation layers are fused together to form a single heat dissipation layer. The structure is then selectively etched to remove a substrate element onto which the first wafer structure was formed.

REFERENCES:
patent: 5724376 (1998-03-01), Kish, Jr. et al.

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