Vertical cavity surface emitting laser diode operable in 1.3 .mu

Coherent light generators – Particular active media – Semiconductor

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372 96, H01S 319

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active

060495561

ABSTRACT:
A vertical cavity surface emitting laser diode includes an active layer of a group III-V compound semiconductor device containing N and As as the group V elements. The active layer has exposed lateral edges wherein the N atoms are substituted by the As atoms at the exposed lateral edges by an annealing process conducted in a AsH.sub.3 atmosphere.

REFERENCES:
patent: 5561681 (1996-10-01), Nishimura
patent: 5912913 (1999-06-01), Kondow et al.
patent: 5943357 (1999-08-01), Lebby et al.
patent: 5956363 (1999-09-01), Lebby et al.
Miyashi, et al. "Growth parameters for metastable GaP1x-Nx alloys in MOVPE" (Inst. Phys. Conf. Ser. No. 141:2 (1994)) Sep., 1994, pp. 97-100.

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