Coherent light generators – Particular active media – Semiconductor
Reexamination Certificate
2008-09-22
2010-10-12
Harvey, Minsun (Department: 2828)
Coherent light generators
Particular active media
Semiconductor
C372S046010, C372S050124
Reexamination Certificate
active
07813403
ABSTRACT:
A vertical cavity surface emitting laser diode (VCSEL) with a new structure is disclosed. The VCSEL of the invention provides the active layer, the first spacer layer, the tunnel junction, the second spacer layer burying the tunnel junction. Only the first spacer layer is ion-implanted to form a high-resistive region around the tunnel junction. The current injected into the second spacer layer is confined by the tunnel junction to reach the active layer, which reduces the increase of the parasitic resistance of the device. The high-resistive region around the tunnel junction reduces the parasitic capacitance of the device.
REFERENCES:
patent: 5513202 (1996-04-01), Kobayashi et al.
patent: 2009/0141766 (2009-06-01), Onishi
Lear et al., “High Power Conversion Efficiencies and Scaling Issues . . . Lasers”, IEEE Photonics Technology Letters, vol. 6, No. 7, Jul. 1994, pp. 778-781.
Harvey Minsun
Park Kinam
Smith , Gambrell & Russell, LLP
Sumitomo Electric Industries Ltd.
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