Vertical cavity surface emitting laser and sensor

Details Vertical cavity surface emitting laser and sensor Vertical cavity surface emitting laser and sensor

1992-08-26

1994-07-19

Davie, James W.

Coherent light generators

Particular active media

Semiconductor

372 92, 372 99, H01S 319

Patent

active

053316584

ABSTRACT:
A vertical cavity surface emitting laser (VCSEL) having sensing capabilities is fabricated by forming a layer having the capability to change the threshold current of the VCSEL. This can be accomplished by forming a deformable membrane or a cantilevered beam on the VCSEL. The deformation of movement of the beam causes a change in the threshold current of the VCSEL, so that it can go from lasing to nonlasing or vice versa. In addition, a layer which changes reflectivity in the presence of a particular chemical can also be formed on the VCSEL to produce the same result.

REFERENCES:
patent: 4483194 (1984-11-01), Rudolf
patent: 4873868 (1989-10-01), Pierre et al.
patent: 4928203 (1990-05-01), Swindal et al.
Putty et al, "Process Integration for Active Polysilicon Resonant Microstructures", Sensors and Actuators, vol. 20, pp. 143-151, (No Month), 1989).
Linder et al, "Investigation on Free-Standing Polysilicon Beams in View of their Application as Transducers", Sensors and Actuators, vol. A21-A23, pp. 1053-1059 (No month), 1990.

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