Vertical cavity surface emitting laser and method of...

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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C372S029013

Reexamination Certificate

active

08040934

ABSTRACT:
A vertical cavity surface emitting laser capable of reducing parasitic capacitance while suppressing power consumption, and a method of manufacturing thereof are provided. The vertical cavity surface emitting laser includes a columnar mesa including, on a substrate, a first multilayer reflector, an active layer, and a second multilayer reflector in order from the substrate side, and also including a current narrowing layer. The columnar portion of the mesa including the active layer and the current narrowing layer is formed within a region opposed to the first multilayer reflector and a region opposed to the second multilayer reflector, and a cross section area of the columnar portion is smaller than a cross section area of the second multilayer reflector.

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Japanese Office Action issued Dec. 28, 2010 for corresponding Japanese Application No. 2009-026675.

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