Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate
2004-07-13
2009-02-03
Wilson, Gregory A (Department: 3749)
Heating
Accessory means for holding, shielding or supporting work...
Support structure for heat treating ceramics
C211S041180
Reexamination Certificate
active
07484958
ABSTRACT:
A vertical boat10for heat treatment comprising a top plate1, a bottom plate2, and a column member fixed between the top plate and the bottom plate, a plurality of grooves8being formed in the column member, and a supporting part for horizontally supporting a wafer-like body to be treated being formed between the grooves, wherein, as the column member, two or more column members3and4, each of which has a circular arc-shaped cross section and has the supporting parts in the shape of circular arc formed integrally inside by formation of the grooves, are cylindrically disposed, and the wafer-like body to be treated is inserted from the grooves of the column members and supported along a circumferential part of a lower surface thereof by the respective circular arc-shaped supporting parts. Thereby, there is provided a vertical boat for heat treatment that can effectively prevent a slip from being generated on a wafer and such during heat treatment, has low material cost, and is relatively easily produced.
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Oliff & Berridg,e PLC
Shin-Etsu Handotai & Co., Ltd.
Wilson Gregory A
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