Versatile semiconductor test structure array

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S765010

Reexamination Certificate

active

11522069

ABSTRACT:
This invention discloses a semiconductor test structure array comprising a plurality of unit cells for containing devices under test (DUT) arranged in an addressable array, and an access-control circuitry within each unit cell for controlling accesses to one or more DUTs, wherein the access-control circuitry comprises at least four identical controlled transmission gates (CTGs), and a plurality of the access-control circuitries are isomorphic.

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Doong, Kelvin Y.Y., et al., “Field-Configurable Test Structure Array (FC-TSA): Enabling design for monitor, model and manufacturability”, IEEE Int'l Conference on Microelectronic Test Structures, Mar. 6-9, 2006.

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