Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2006-06-27
2006-06-27
Fuqua, Shawntina (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S418000, C219S390000, C219S388000, C219S405000, C219S411000, C118S724000, C118S725000, C118S050100, C414S217000, C165S133000, C432S121000
Reexamination Certificate
active
07068925
ABSTRACT:
The present invention comprises a fully automated, fabrication compliant furnace with the advantages of the horizontal and most of the advantages of the vertical furnace. One embodiment of the present invention is that it implements a multi-degree motion robot arm to move wafers from a loading area to a WIP station where the wafers are then loaded into wafer boats on a rotating cantilever system or directly onto a specialized and reconfigurable paddle designed to hold wafers. The wafers may be loaded in the horizontal processing position as well as the vertical processing position. Multiple levels of the semi-toroidal horizontal processors allow for multiple batches of wafers to be loaded, processed, cooled and unloaded by the robot arm.The present invention reduces the footprint of the traditional horizontal or vertical furnaces, increases capacity and throughput, and allows for direct tube transfer.
REFERENCES:
patent: 6281479 (2001-08-01), Guidotti et al.
patent: 6291801 (2001-09-01), Guidotti et al.
patent: 6672819 (2004-01-01), Soraoka et al.
Nerac Search, 1015237.048 Technical; Furnaces; CVD; Diffusion: Tubes; Wafer; Substrates, Peg Leahy, Feb. 12, 2002 (28 pages).
Diamond Semiconductor, Inc.
Dort David B.
Dort Partners IP PLLC
Fuqua Shawntina
LandOfFree
Versatile semi-toroidal processing furnace with automatic... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Versatile semi-toroidal processing furnace with automatic..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Versatile semi-toroidal processing furnace with automatic... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3675272