Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond
Patent
1989-10-13
1990-11-06
Powell, William A.
Stock material or miscellaneous articles
Structurally defined web or sheet
Discontinuous or differential coating, impregnation or bond
156628, 156643, 156646, 156657, 1566591, 156668, 156904, 20419236, 252 791, 427 38, 427 431, 428199, 430299, 430313, B44C 122, B29C 3700, B32B 300, H01L 21306
Patent
active
049685520
ABSTRACT:
The present invention provides a novel approach to forming a RIE etch barrier in processes where thermally stable polymeric materials containing free carboxyl groups, such as polyamic acid polymers, are present as masking layers in the electrical device to be fabricated. The present process takes advantage of the discovery that polyamic acids complex with certain metallic cations under slightly acidic conditions to form polyamic acid salts. These salts can be made to further react with a variety of etching gases to form a non-volatile salt or oxide which imparts etch barrier properties to that portion of the polyamic acid layer exposed to the metallic cations.
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Linde, H.-Journal of Polymer Science (Polymer Physics Ed.), 26, pp. 1485-1497 (1989).
International Business Machines Corp.
Powell William A.
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