Versatile maskless lithography system with multiple resolutions

Details Versatile maskless lithography system with multiple resolutions Versatile maskless lithography system with multiple resolutions

2007-01-16

2007-01-16

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S077000

Reexamination Certificate

active

10890498

ABSTRACT:
A versatile maskless patterning system with capability for selecting rapidly among a plurality of projection lenses mounted on a turret. This provides the ability to rapidly select multiple choices for resolution and enables optimization of the combination of the imaging resolution and exposure throughput, making possible cost-effective fabrication of microelectronics packaging products. A preferred embodiment uses a digital micromirror device array spatial light modulator as a virtual mask. Another preferred embodiment use multiple closely spaced digital micromirror device array spatial light modulators to enhance throughput.

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