Vented vacuum semiconductor wafer cassette

Details Vented vacuum semiconductor wafer cassette Vented vacuum semiconductor wafer cassette

1990-02-05

1992-08-11

Recla, Henry J.

Fluent material handling, with receiver or receiver coacting mea

Combined

414217, 25044111, 206334, 2065248, H05K 100

Patent

active

051370638

ABSTRACT:
A vacuum storage cassette for semiconductor wafers has one or more valves to allow the cassette to be evacuated, backfilled, and opened to the surround atmosphere and resealed without the need for a vacuum load-lock chamber.

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patent: 4797054 (1989-01-01), Arii
patent: 4832612 (1989-05-01), Grabbe et al.
patent: 4969556 (1990-11-01), Ishimaru et al.
patent: 5024329 (1991-06-01), Grohrock

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