Vehicle for transporting a semiconductor device carrier to a...

Details Vehicle for transporting a semiconductor device carrier to a... Vehicle for transporting a semiconductor device carrier to a...

2005-02-22

2005-02-22

Keenan, James W. (Department: 3652)

Material or article handling

Self-loading or unloading vehicles

Loading or unloading by other carrier or mover means, and...

C414S396000, C414S940000

Reexamination Certificate

active

06857841

ABSTRACT:
A vehicle for transporting semiconductor devices is used for servicing loadports of semiconductor processing tools with device carriers by use of a portal hoist. Thereby, the vehicle contains an empty inner space and an open front side, such that the loadport is enclosed by the vehicle, when it approaches and docks to the loadport. Time for loading is shortened, complexity of structure and procedure is reduced and cleanroom space is saved.

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Drew, M. et al.: “Flexible ToolL Interfaces Increase REesponsiveness of Process Equipment Suppliers”, Automation, Solid State Technology, Jul. 1996, pp. 217, 218, 220, 222, 225, 227, 228.

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