VCSEL with integrated pin diode

Coherent light generators – Particular active media – Semiconductor

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Details

372 45, 372 96, H01S 319

Patent

active

057426309

ABSTRACT:
A VCSEL (113) having first and second stacks of DBRs (120, 116) and an active region sandwiched therebetween (118) is formed. A PIN photo-detector is integrated onto the VCSEL by positioning it on the second stack in the light path. The PIN photo detector includes a first doped region (104), a second undoped (intrinsic) region (106), and a third doped region (108). A first conductive layer (134) is provided in contact with the second stack and the first region and a second conductive layer is provided in contact with the third region.

REFERENCES:
patent: 5136603 (1992-08-01), Hasnain et al.

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