VCSEL with integrated photodetectors for automatic power control

Details VCSEL with integrated photodetectors for automatic power control VCSEL with integrated photodetectors for automatic power control

1997-05-20

1999-10-26

Bovernick, Rodney

Coherent light generators

Particular active media

Semiconductor

372 96, H01S 319, H01S 308

Patent

active

059740710

ABSTRACT:
A VCSEL with a vertically integrated photodetector and at least one laterally integrated photodetector, including first and second stacks of DBRs and an undoped region or active region sandwiched therebetween is formed. The vertically and laterally integrated PIN photodetectors are integrated into the device by depositing the region of undoped material in alignment with the first stack of DBRs. The device is fabricated to electrically isolate the vertical cavity surface emitting laser and the vertically integrated photodetector from the at least one laterally integrated photodetector.

REFERENCES:
patent: 5574744 (1996-11-01), Gaw et al.
patent: 5577064 (1996-11-01), Swirhun et al.
patent: 5606572 (1997-02-01), Swirhun et al.
patent: 5663944 (1997-09-01), Mun
patent: 5732101 (1998-03-01), Shin
patent: 5737348 (1998-04-01), Smith
patent: 5757837 (1998-05-01), Lim et al.

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