VCSEL with integrated MSM photodetector

Coherent light generators – Particular active media – Semiconductor

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372 96, 372 46, H01S 319

Patent

active

057517576

ABSTRACT:
A VCSEL (113) having a first and a second stack of distributed Bragg reflectors (120, 116) and an active region (118) defining a light generating and emitting path. A layer (104) of semiconductor material is formed on the second stack (116) so as to intersect the light path and a first electrode (106) and a second electrode (108) are disposed on the layer (104) to form a metal-semiconductor-metal photodetector (102). The metal-semiconductor-metal photodetector (102) absorbs some of the light emitted by the VCSEL (113) and provides an indication of the light output intensity, which indication may be used to control the VCSEL (113).

REFERENCES:
patent: 5491712 (1996-02-01), Lin et al.
patent: 5606572 (1997-02-01), Swirhun et al.

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