VCSEL having integrated photodetector for automatic power contro

Details VCSEL having integrated photodetector for automatic power contro VCSEL having integrated photodetector for automatic power contro

1998-04-27

2000-07-18

Sanghavi, Hemang

Coherent light generators

Particular active media

Semiconductor

372 46, 372 96, H01S 319

Patent

active

060917547

ABSTRACT:
A VCSEL (113) having a first and a second stack of distributed Bragg reflectors (120, 116) and an active region (118) is formed. Conductive layers (108 and 109) having an opening is formed on the second stack of distributed Bragg reflectors (116). A first region (104), a second region (106), and a third region (108) are formed in the opening of the conductive layer (108), thereby providing a contact to both the second stack of distributed Bragg reflectors (116) and to the first region (104). An insulative layer (220) is disposed on the substrate (124), thereby insulating the second region (106) from the conductive layer (108). A conductive layer (134) having second opening disposed substantially overlying the first opening, thereby electrically coupling the third region (108) to the conductive layer (134) with the second opening allowing a light (121) to pass.

REFERENCES:
patent: 5606572 (1997-02-01), Swirhun et al.
patent: 5742630 (1998-04-01), Jiang et al.
patent: 5751757 (1998-05-01), Jiang et al.
patent: 5838708 (1998-11-01), Lin et al.

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