Coherent light generators – Particular active media – Semiconductor
Reexamination Certificate
2011-06-07
2011-06-07
Park, Kinam (Department: 2828)
Coherent light generators
Particular active media
Semiconductor
C372S050120, C372S046013, C372S046010, C372S045010
Reexamination Certificate
active
07957447
ABSTRACT:
Provided is a VCSEL array device that includes at least a first multilayer reflective film, an active layer, and a second multilayer reflective film, formed on a substrate that extends in a longitudinal direction. Plural mesa portions are formed on the substrate by selectively removing at least a portion of the first multilayer reflective film, active layer, and second multilayer reflective film. A selectively oxidized region is formed in at least one of the first multilayer reflective film and the second multilayer reflective film. The VCSEL array device further includes an interlayer insulating film that covers at least a side portion and a bottom portion of the mesa portions, and a surface protecting film that covers the interlayer insulating film. The surface protecting film has plural grooves formed along a longitudinal direction of the substrate in which at least a portion of the surface protecting film is removed.
REFERENCES:
patent: 6201825 (2001-03-01), Sakurai et al.
patent: 2004/0114653 (2004-06-01), Omori
patent: 2004/0151221 (2004-08-01), Yamamoto et al.
patent: 2004/0156410 (2004-08-01), DeBrabander et al.
patent: 2005/0265671 (2005-12-01), Ono et al.
patent: 2006/0187997 (2006-08-01), Ezaki et al.
patent: 2007/0014323 (2007-01-01), Tachibana et al.
patent: 2007/0121695 (2007-05-01), Miyamoto
patent: 11-340565 (1999-12-01), None
patent: 2001-168282 (2001-06-01), None
patent: 2004-200210 (2004-07-01), None
patent: 2004-200211 (2004-07-01), None
patent: 2004-241777 (2004-08-01), None
patent: 2006-86498 (2006-03-01), None
patent: 2006-228892 (2006-08-01), None
patent: 2007-027260 (2007-02-01), None
patent: 2007-173513 (2007-07-01), None
Matsushita Kazuyuki
Ueki Nobuaki
Fildes & Outland, P.C.
Fuji 'Xerox Co., Ltd.
Park Kinam
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