Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Patent
1997-03-19
1999-08-17
Kunemund, Robert
Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
117 90, 117 92, 117 94, 117 95, 117103, 117929, 427566, C30B 2902
Patent
active
059388382
ABSTRACT:
A head drum is coated with double films, each having different characteristics, by forming a first diamond-like hard carbon film of high degree of hardness and then forming a second diamond-like hard carbon film of a lower degree of hardness thereon. The degree of hardness of the second film is lower than that of the first film. The double coating is performed by means of a synthesizing apparatus which comprises a reactor consisting of a power supply electrode, a workpiece support and and an annular ground electrode spaced from the stacked head drums by a predetermined distance.
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Eun Kwang-Yong
Kim Keun-Mo
Lee Kwang-Ryeol
Korea Institute of Science and Technology
Kunemund Robert
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