Varying multipole plasma source

Details Varying multipole plasma source Varying multipole plasma source

1998-03-04

1999-08-31

Breneman, Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118723MA, 118723I, 118723E, C23C 1600

Patent

active

059449420

ABSTRACT:
Gas diffuser bolt (35) is used to improve process gas flow from near the center of process chamber (40) across workpiece (58) to exhaust ports near the periphery of process chamber (40), process nonuniformity is improved by adjusting the vertical position of each varying magnetic pole (10) relative to two-pole rounded oblong dielectric window (22), differential driving of metal voltage reference plate (18) and workpiece electrode (60) reduce the voltage between the plasma and process chamber (40), reducing particulates and improving efficiency, and temperature control of metal voltage reference plate (18) improves process chamber (40) cleaning.

REFERENCES:
patent: 4871421 (1989-10-01), Ogle
patent: 5261962 (1993-11-01), Hamamoto
patent: 5435881 (1995-07-01), Ogle
patent: 5589737 (1996-12-01), Barnes
patent: 5795429 (1998-09-01), Ishii

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