Variable width conductive lines having substantially...

Details Variable width conductive lines having substantially... Variable width conductive lines having substantially...

2011-01-25

2011-01-25

Deo, Duy-Vu N (Department: 1713)

Electric heating

Metal heating

By arc

C219S121710, C219S121760

Reexamination Certificate

active

07875826

ABSTRACT:
A method of fabricating a conductive line provides a substrate having a blanket layer of conductive material disposed thereon, a removing of a first portion of the blanket layer of conductive material to form one or more gaps that define a first line, the gaps adjacent to the first line, the first line having at least a first segment of a first width and a second segment of a second width, the first and second widths being different, a first increasing of the width of a first gap of the one or more gaps, the first gap adjacent to the first segment, by a first amount, and a second increasing of the width of a second gap of the one or more gaps, the second gap adjacent to the second segment, by a second amount wherein the first and second increasing depend upon a desired electrical characteristic. The first amount and the second amount may be different from each other.

REFERENCES:
patent: 4560962 (1985-12-01), Barrow
patent: 5948718 (1999-09-01), Kanba et al.

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