Variable travel carrier device and method for planarizing semico

Details Variable travel carrier device and method for planarizing semico Variable travel carrier device and method for planarizing semico

1996-06-27

1998-03-03

Smith, James G.

Abrading

Machine

Rotary tool

451288, 451 41, 451287, B24B 700, B24B 900, B24B 1700

Patent

active

057228795

ABSTRACT:
A chemical mechanical planarization tool and method are presented employing a non-linear motion of the carrier arm relative to the polishing pad. The non-linear motion of the carrier arm relative to the polishing pad can be accomplished in a variety of ways, for example, employing a mechanical template having an irregular opening or programming the carrier displacement mechanism to move the carrier in an irregular, non-rotational X-Y path over the polishing pad.

REFERENCES:
patent: 4593495 (1986-06-01), Kawakami et al.
patent: 5234867 (1993-08-01), Schultz et al.
patent: 5267418 (1993-12-01), Currie et al.
patent: 5421769 (1995-06-01), Schultz et al.

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