Variable spectroscopy element, spectroscopy apparatus, and...

Details Variable spectroscopy element, spectroscopy apparatus, and... Variable spectroscopy element, spectroscopy apparatus, and...

2008-01-29

2011-12-20

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

Spectroscopy

C359S578000

Reexamination Certificate

active

08081314

ABSTRACT:
Desired spectral characteristics are achieved while achieving reduced size and decreased noise, and detecting the distance between optical substrates with superior precision. Provided is a variable spectroscopy element (1) including optical coating layers (3) provided on opposing surfaces, which face each other, of first and second optical substrates (4a,4b) that face each other with a gap therebetween; an actuator (4c) that changes the gap between the first and second optical substrates (4a,4b); a first sensor portion (6a) provided on the first optical substrate (4a), for detecting the gap between the first and second optical substrates (4a,4b); and a second sensor portion (6b) provided on the second optical substrate (4b) so as to oppose the first sensor portion (6a), for detecting the gap between the first and second optical substrates (4a,4b), wherein the numbers of the first and second sensor electrodes (6a,6b) differ.

REFERENCES:
patent: 6822779 (2004-11-01), Chi
patent: 7961335 (2011-06-01), Matsumoto
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patent: 2006-178320 (2006-07-01), None
patent: 2006-187598 (2006-07-01), None

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