Variable optical attenuator

Optical waveguides – Accessories – Attenuator

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385 33, 385 25, G02B 626

Patent

active

061379417

ABSTRACT:
A variable optical attenuator includes a lens, first and second optical waveguides, and a semiconductor micro-electro-mechanical device positioned on a side of the lens opposite the first and second optical waveguides. The semiconductor micro-electro-mechanical device may be, for example, a digital micromirror device or a silicon micro-electro-mechanical system. The device has a reflecting surface. The reflecting surface has a normal position in which light from the first waveguide reflects off of the reflecting surface and passes through the lens into the second waveguide. The reflecting surface has a plurality of respectively different attenuating positions in which light from the first waveguide reflects off of the reflecting surface and passes through the lens, but an amount of light entering the second optical waveguide is attenuated by respectively different amounts corresponding to the respectively different positions. By pivoting the reflecting surface about 0.35 degrees or less from the normal position, 40 dB of attenuation are obtained relative to the normal position. The optical attenuator can achieve about 25 dB of attenuation using a 5 Volt power supply.

REFERENCES:
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patent: 4198118 (1980-04-01), Porter
patent: 4498730 (1985-02-01), Tanaka
patent: 5900983 (1999-05-01), Ford et al.
patent: 5915063 (1999-06-01), Colbourne et al.
D. W. Monk, R.O. Gale, Article from Microelectronic Engineering 27, 1995, pp. 489-493.
MEMS Technology Applications Center, Overview, Last Modified Oct. 1, 1997.

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