Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-10-04
2005-10-04
Spector, David N. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S846000, C359S847000, C359S853000
Reexamination Certificate
active
06952304
ABSTRACT:
A deformable mirror according to the invention comprises a substrate, a reflector which is supported by said substrate and the shape of whose reflecting areas is variable, and a plurality of drive units for independently driving a plurality of regions of the reflector and thereby controlling the distances between said plurality of regions and said substrate. Each of the plurality of drive units comprises a plurality of electrodes disposed over said substrate, a tilt member which is rotated round the axis of tilt by being attracted by the selected one of the plurality of electrodes, and an action member for varying the distance between a specific region of the reflector and said substrate following the motion of the tilt member.
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Mushika Yoshihiro
Takizawa Teruyuki
Akin Gump Strauss Hauer & Feld & LLP
Matsushita Electric - Industrial Co., Ltd.
Spector David N.
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