Variable micro-capacitor with a high ratio and a low...

Details Variable micro-capacitor with a high ratio and a low... Variable micro-capacitor with a high ratio and a low...

2006-04-18

2006-04-18

Thomas, Eric W. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S282000

Reexamination Certificate

active

07031137

ABSTRACT:
A MEMS micro-capacitor having a variable capacity is disclosed. The MEMS micro-capacitor has at least one fixed electrode (3) positioned on one surface of a substrate (1); bending means with respect to the surface of the substrate including at least one moveable electrode (5) located opposite the fixed electrode (3); a layer of solid dielectric material interposed between the fixed electrode and the moveable electrode; and means (5, 6and7) for applying a bending force to the bending means. The bending force is intended to move the moveable electrode (5) with respect to the fixed electrode (3) in order to obtain, between these electrodes, a capacity that varies according to the applied bending force. The bending means are designed to clamp the layer of dielectric material between the moveable electrode and the fixed electrode so as to obtain a variable surface of the clamped layer of dielectric material.

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Feng et al., “MEMS-based series and shunt variable capacitors for microwave and millimeter-wave frequencies”, 2001, Sensors and Actuators, vol. A, No. 91, pp. 256-265.
International Search Report, PCT/FR02/03631, dated May 22, 2003.

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