Variable magnification apparatus for reticle projection system

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems

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359363, 348136, G02B 704

Patent

active

056190310

ABSTRACT:
A magnifying lens system is fixed to the lower end of a vertically adjustable support plate to overlie a workpiece, and to project an image thereof upwardly through a beamsplitter to the image sensor of a video camera that is mounted for vertical adjustment on the support plate above the lens system. A portion of the lens system registers with the reflective surface of a mirror which is inclined to the horizontal, and which registers also with the output of a reticle projecting mechanism that is operatively connected to the video camera for vertical adjustment therewith on the support plate. During auto-focusing, an image of a reticle contained in the reticle projecting mechanism is projected via the mirror, the lens system and the beamsplitter onto the surface of the workpiece. Since the reticle projecting mechanism is coupled to the camera, magnification of the images of the workpiece surface and the reticle will occur simultaneously.

REFERENCES:
patent: 4639587 (1987-01-01), Chadwick et al.
patent: 4920273 (1990-04-01), Sacks et al.
patent: 5389774 (1995-02-01), Gelman et al.

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