Variable lot size load port

Details Variable lot size load port Variable lot size load port

2007-07-09

2009-10-06

Fox, Charles A (Department: 3652)

Material or article handling

Device for emptying portable receptacle

With container opening means

C414S217000, C414S940000

Reexamination Certificate

active

07597523

ABSTRACT:
A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.

REFERENCES:
patent: 5653565 (1997-08-01), Bonora et al.
patent: 6071059 (2000-06-01), Mages et al.
patent: 6220808 (2001-04-01), Bonora et al.
patent: 6382896 (2002-05-01), Hu et al.
patent: 6419438 (2002-07-01), Rosenquist
patent: 6830651 (2004-12-01), Obikane
patent: 6981832 (2006-01-01), Zinger et al.

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