Variable lens and exposure system

Details Variable lens and exposure system Variable lens and exposure system

2007-04-25

2008-12-02

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

Fluid

C359S626000, C359S649000

Reexamination Certificate

active

07460309

ABSTRACT:
A lithography apparatus comprising variable lenses is described. These variable lenses are included in a microlens array. At least some of the lenses have two or more immiscible liquids whose optical properties can be varied, for example, by an application of a voltage.

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