Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Reexamination Certificate
2007-05-22
2007-05-22
Schwartz, Jordan M. (Department: 2873)
Optical: systems and elements
Single channel simultaneously to or from plural channels
By surface composed of lenticular elements
C359S649000, C359S665000, C359S666000
Reexamination Certificate
active
11106722
ABSTRACT:
A lithography apparatus having variable lenses.
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ASML Netherlands B.V.
Schwartz Jordan M.
Sterne Kessler Goldstein & Fox PLLC
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