Radiant energy – Irradiation of objects or material
Patent
1990-02-05
1990-11-27
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
250504R, G01J 100
Patent
active
049738500
ABSTRACT:
A variable incident angle exposure apparatus wherein the incident angle of exposure light can be set as desired. The apparatus comprises a cold type elliptical reflecting mirror provided in a casing having a window for exposure at which a workpiece is disposed, a spot light source for ultraviolet rays disposed at the focal point of the elliptical reflecting mirror, a first cold type plane reflecting mirror fixed at an angle of inclination of 45 degrees with respect to the horizontal plane to reflect the reflected light from the elliptical reflecting mirror, a second cold type plane reflecting mirror fixed at an angle of inclination of 45 degrees with respect to the horizontal plane to reflect the reflected light from the first plane reflecting mirror, a relatively large cold type spherical reflecting mirror arranged to receive the reflected light from the second plane reflecting mirror through a fly-eye lens for making compensation for chromatic aberration and reflect the received light in the form of parallel rays, and a movable reflecting mirror arranged to reflect the parallel rays from the large spherical reflecting mirror toward the exposure window, the angle of inclination of the movable reflecting mirror being variable so that the parallel rays are incident on the exposure window at a desired incident angle.
REFERENCES:
patent: 3325238 (1967-07-01), Geier
patent: 4019062 (1977-04-01), Rongren
patent: 4687933 (1987-08-01), Loy
patent: 4704521 (1987-11-01), Loy
patent: 4707609 (1987-11-01), Shimamura
patent: 4710638 (1987-12-01), Wood
patent: 4849640 (1989-07-01), Kruishoop
Tanaka Motoyuki
Watanuki Minoru
Anderson Bruce C.
ORC Manufacturing Co. Ltd.
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