Variable illumination source

Details Variable illumination source Variable illumination source

2008-01-08

2008-01-08

Assouad, Patrick (Department: 2862)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S068000, C355S069000

Reexamination Certificate

active

07317506

ABSTRACT:
An apparatus and method for providing a variable illumination field for use in lithographic imaging for semiconductor manufacturing includes providing a an illumination system including a variable optical element having an array of addressable elements, each addressable element constructed and arranged to have a variable transmittance.

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